Holo/Or’s Diffractive Lens Arrays Best Choice for Multi-Beam Lithography Applications
In a recently published study project, various types of micro-lens arrays were evaluated in multi-beam laser lithography applications. The paper documenting this study is entitled, “Evaluation of Microlenses for Application in Nanolithography.” Holo/Or diffractive lens arrays came out first! Holo/Or’s diffractive lenses maintained the laser M2 with no measurable added aberrations, significantly better than refractive … Continue reading






