Analyzing Laser-Produced Plasma Sources of Extreme Ultraviolet Light
A greateyes CCD camera was integral to the success of the study “Spectral and Spatial Resolution of an Extreme Ultraviolet Broadband Imaging Spectrometer.”
A research team utilized the greateyes GE2048 512BI UV1 camera to advance the analysis of laser-produced plasma sources of extreme ultraviolet (EUV) light.
The spectrometer, coupled with their high-resolution CCD, provided critical insights into both spectral and spatial resolution over a broad wavelength range (5–180 nm).
In this study, the greateyes camera played a key role in capturing precise images of the plasma, helping the researchers to:
- Achieve a spectral resolution of 1.2 nm at 13.5 nm, close to the design value
- Determine the spatial resolution, which was found to be 17 µm — still within design limits, ensuring reliable diagnostics for plasma research
greateyes technology continues to support groundbreaking work in scientific fields like plasma physics and extreme ultraviolet light analysis, which are vital to advancing areas like EUV lithography and other high-tech applications.
About greateyes Cameras
greateyes offers a series of high-performance, cooled, full-frame, CCD scientific cameras for imaging and spectroscopy in the range of X-ray to near-infrared (NIR). The cameras combine scientific, highly sensitive CCD sensors and ultra-low noise electronics for optimal detection of weak signals and measurements with high dynamic range. They can be used as detectors for a broad range of applications common in the industrial and scientific community, including:
- Spectroscopy
- Imaging
To request more information or a quotation for greateyes products, contact IL Photonics.