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ISTEQ introduces their latest products in the EUV light source — 13.5 nm TEUS (S100, S200 and S400) product line. These devices are based on laser-produced plasma (LPP) with extremely high brightness, low debris, and a high duty cycle. Right now this is the only LPP EUV light source available worldwide for mask inspections and … Continue reading
ISTEQ presents two new plasma light sources: the XWS-30 compact light source and the Hyperchromator tunable light source. The company has a wide range of expertise in developing and manufacturing laser-pump plasma light sources, DPP/LPP EUV light sources, spectrometers, diagnostic equipment, as well as modeling software and codes. XWS-30 Compact Light Source The XWS-30 is … Continue reading