Holo/Or’s Diffractive Lens Arrays Best Choice for Multi-Beam Lithography Applications
In a recently published study project, various types of micro-lens arrays were evaluated in multi-beam laser lithography applications. The paper documenting this study is entitled, “Evaluation of Microlenses for Application in Nanolithography.”
Holo/Or diffractive lens arrays came out first! Holo/Or’s diffractive lenses maintained the laser M2 with no measurable added aberrations, significantly better than refractive MLAs, while maintaining high efficiency and suppressing higher orders.
About Holo/Or
Holo/Or develops, designs and manufactures diffractive optical elements (DOEs) and micro-optical elements for any wavelength, from DUV to far IR, as well as software/automation solutions for the design. Holo/Or’s products include:
If you are interested in DOEs for your application, contact Holo/Or.