Single Frequency Source for the Semiconductor Industry
The IXION 193 is Xiton’s 193.368 nm all solid-state, single frequency source for quality control within the leading edge technologies of the semiconductor industry. It is well proven in countless applications like spectrometer calibration, interferometry, and material testing.
The center wavelength of the system is customizable in a range between 185 and 194 nm and can be configured for a fixed wavelength at the time of order. It can be tuned to the exact wavelength of ArF Excimer lasers that are typically used in this field. This laser reveals TEM00 beam profile and a coherence length of more than 4 meters.
As an additional option, a high precision spectrometer with an absolute spectral accuracy of 0.001 nm can be integrated into the system. This enables maximum precision for the control of the spectral tuning of the laser.
About Xiton Photonics
Xiton Photonics GmbH has been developing and manufacturing high quality, diode-pumped, solid-state (DPSS) laser sources for more than 15 years. Their core expertise lies in nonlinear optical conversion, which enables the engineering of high-power laser systems for almost any desired wavelength in a range from 185 nm in the deep-UV to 5 µm in the mid-infrared or even further in the far infrared. Their lasers provide high reliability, excellent beam profile, high average output power, and high stability. Due to these outstanding properties, their laser sources are used by leading manufacturers, operating 24/7 in production lines across the globe.
To request more information or a quotation for Xiton Photonics products, contact IL Photonics.