Did you know that CO2 lasers are used to create cutting-edge integrated circuits in your mobile phones? Extreme ultraviolet lithography (EUVL) systems use a 30-kW, short pulse CO2 laser focused on a 30 µm liquid tin droplet, repeatedly 50,000 times per second, to produce 250 W of EUV light at a 13.5 nm wavelength. The … Continue reading
Ceramics and ceramic-like materials are essential in science and industry due to their outstanding thermal, mechanical, chemical properties. In a recent article, PHAROS femtosecond laser from Light Conversion was used for laser lithography of hybrid organic-inorganic materials with subsequent heat treatment leading to tunable-crystalline-phase 3D nanostructures with feature resolution down to 60 nm. The article, entitled “Laser additive manufacturing of Si/ZrO2 tunable crystalline phase … Continue reading
Laser lithography is a versatile technique for the creation of microstructures such as microelectromechanical systems (MEMS) and integrated circuits. It works on the same principles as photolithography but developments in laser technologies have meant that laser-based manufacturing has become increasingly popular. Photoresists Photolithography uses of a photosensitive polymer applied to a surface that is covered … Continue reading