Using DOEs in Semiconductor Applications
Diffractive Optical Elements (DOEs) are used in many semiconductor applications, mostly in the UV and visible wavelengths. Holo/Or’s high grade UV-fused silica DOEs give unparalleled performance stability for direct-writing lithography applications and wafer metrology applications common in the semiconductor industry. In these precise applications, these DOEs provide superior performance due to the almost absolute angular accuracy, excellent thermal stability and high laser damage threshold.
Wafer Inspection
As the ITRS 2.0 standard drives the semiconductor industry to greater miniaturization, there is an increasing need for the development of Deep Ultraviolet (DUV) wafer inspection systems capable of resolving such features. These systems require shaping of the light — either by diffusers (for low coherence sources) or by beam shapers (for highly coherent single mode laser sources). The illumination is also often accomplished at high grazing angles (>70 degrees), requiring careful design of the shaping optics to achieve high uniformity on the wafer surface.
Holo/Or has some unique solutions for the wafer inspection field, including custom beam shaping elements and modules that can achieve high angle uniform shapes at high grazing angles.
Relevant products include: Beam shapers, collimated beam shaper, diffuser
Direct Laser Lithography
Many applications in the semiconductor industry require high throughput direct laser writing of multiple lines. These techniques include flat display mask writing, solar panel electrode writing, and other multi-line exposure processes. For these applications, Holo/Or’s high quality beam splitter DOEs offer unparalleled precision and uniformity, eliminating line thickness variation and enhancing throughput.
Relevant products include: Beam splitter 1D
About Holo/Or
Holo/Or develops, designs and manufactures diffractive optical elements (DOEs) and micro-optical elements for any wavelength, from DUV to far IR, as well as software/automation solutions for the design. Holo/Or’s products include:
If you are interested in DOEs for your application, contact Holo/Or.