Using PHAROS Femtosecond Laser for Laser Lithography
Ceramics and ceramic-like materials are essential in science and industry due to their outstanding thermal, mechanical, chemical properties. In a recent article, PHAROS femtosecond laser from Light Conversion was used for laser lithography of hybrid organic-inorganic materials with subsequent heat treatment leading to tunable-crystalline-phase 3D nanostructures with feature resolution down to 60 nm.
The article, entitled “Laser additive manufacturing of Si/ZrO2 tunable crystalline phase 3D nanostructures,” appears in the journal Opto-Electronic Advances.
PHAROS is a series of femtosecond lasers combining millijoule pulse energy and high average power. PHAROS features a mechanical and optical design optimized for both scientific and industrial applications. A compact, thermally-stabilized, and sealed design enables PHAROS integration into various optical setups and machining workstations. Diode-pumped Yb medium significantly reduces maintenance costs and provides a long laser lifetime, while the robust optomechanical design enables stable operation in varying environments.
Features of PHAROS:
- 100 fs – 20 ps tunable pulse duration
- 3 mJ maximum pulse energy
- 20 W maximum output power
- Single-shot – 1 MHz repetition rate
- Pulse picker for pulse-on-demand mode
- Automated harmonic generators (up to 5th harmonic)
- CEP stabilization option
- Repetition rate locking to an external source
To request more information or a quotation for this or other Light Conversion products, contact IL Photonics.